Patent Assignment
Reel/Frame 008520/0106
Assignment of Assignor's Interest
Recorded: 1997-04-29
Pages: 2
Assignors
JIWARI, NOBUHIRO
Executed: 1997-04-15
IMAI, SHINICHI
Executed: 1997-04-15
NIKOH, HIDEO
Executed: 1997-04-15
Assignee
MATSUSHITA ELECTRONICS CORPORATION
1-1, SAIWAI-CHO, TAKATSUKI-SHI, OSAKA, JAPAN
Covered Property
(1)
Substrate Cooling Apparatus and Semiconductor Manufacturing Apparatus
Application:
08/848,654 →
Publication:
US 2001/0008124
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.