Patent Assignment
Reel/Frame 010005/0932
Assignment of Assignor's Interest
Recorded: 1999-04-01
Received: 1999-06-11
Pages: 2
Assignor
SCHONLEBER, DIETMAR
Executed: 1999-03-12
Assignee
STEAG MICROTECH GMBH
CARL-BENZ-STRASSE 1-3, 72124 PLIEZHAUSEN, DEX, GERMANY
Covered Property
(1)
Method and Device for Treating Substrates
Application:
09/284,035 →