Patent Assignment
Reel/Frame 011540/0071
Assignment of Assignor's Interest
Recorded: 2001-02-07
Received: 2001-03-05
Pages: 2
Assignors
BUIS, EDWIN JOHAN
Executed: 2001-01-19
GILISSEN, NOUD JAN
Executed: 2001-01-19
KWAN, YIM BUN PATRICK
Executed: 2001-01-19
SCHAPENDONK, PAULUS HENDRICUS CORNELIS MARIA
Executed: 2001-01-19
Assignee
ASM LITHOGRAPHY B.V.
DE RUN 1110, NL-5503 LA VELDHOVEN, NLX, NETHERLANDS
Covered Property
(1)
Cooling of Voice Coil Motors in Lithographic Projection Apparatus
Application:
09/777,701 →