Patent Assignment
Reel/Frame 011573/0709
Assignment of Assignor's Interest
Recorded: 2001-02-20
Pages: 7
Assignee
OPTICAL MICRO-MACHINES, INC.
9410 CARROLL PARK DRIVE, SAN DIEGO, CALIFORNIA, 92121
Covered Property
(1)
Method for improving the polysilicon structures of a mems device by masking to inhibit anodic etching of the mems polysilicon structures
Application:
09/697,035 →
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.