Patent Assignment
Reel/Frame 011630/0201
Assignment of Assignor's Interest
Recorded: 2001-03-19
Received: 2001-04-02
Pages: 5
Assignors
EDWARDS, ALLEN D.
Executed: 2001-03-19
HARRISON, ARTHUR W.
Executed: 2001-03-19
MARTIN, JOHN M.
Executed: 2001-03-19
Assignee
AMTECH SYSTEMS, INCORPORATED
131 SOUTH CLARK DRIVE, TEMPE, AZ, 85281, UNITED STATES
Covered Property
(1)
Wafer Boat Support and Method for Twin Tower Wafer Boat Loader
Application:
09/812,014 →