Patent Assignment
Reel/Frame 011669/0333
Assignment of Assignor's Interest
Recorded: 2001-03-30
Pages: 3
Assignors
BAUM, THOMAS H.
Executed: 2001-03-29
XU, CHONGYING
Executed: 2001-03-29
HENDRIX, BRYAN C.
Executed: 2001-03-29
ROEDER, JEFFREY F.
Executed: 2001-03-29
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CONNECTICUT, 06810
Covered Property
(1)
Source Reagent Compositions for Cvd Formation of Gate Dielectric Thin Films Using Amide Precursors and Method of Using Same