Patent Assignment
Reel/Frame 011727/0095
Assignment of Assignor's Interest
Recorded: 2001-04-06
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, ATTN: JOHN A. KASTELIC, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Plasma source having supplemental energizer for ion enhancement
Application:
09/828,055 →