Patent Assignment
Reel/Frame 011776/0352
Assignment of Assignor's Interest
Recorded: 2001-05-01
Received: 2001-05-11
Pages: 4
Assignor
KOROVIN, NIKOLAY N.
Executed: 2001-04-27
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, AZ, 85226, UNITED STATES
Covered Property
(1)
Method for Controlling a Process in a Multi-Zonal Apparatus
Application:
09/846,965 →