Patent Assignment
Reel/Frame 011808/0308
Assignment of Assignor's Interest
Recorded: 2001-05-09
Pages: 2
Assignors
HAYASHI, SEIICHI
Executed: 2001-04-25
HARADA, JIMPEI
Executed: 2001-04-25
KIKUCHI, TETSUO
Executed: 2001-04-25
OMOTE, KAZUHIKO
Executed: 2001-04-25
INABA, KATSUHIKO
Executed: 2001-04-25
Assignee
RIGAKU CORPORATION
3-9-12, MATSUBARA-CHO, AKISHIMA-SHI, TOKYO 196-8666, JAPAN
Covered Property
(1)
Method and Apparatus for Measuring Thin Film, and Thin Film Deposition System