Assignment of Assignor's Interest

Recorded: 2001-05-14 Received: 2001-05-22 Pages: 4

Assignors

BERRY, IVAN

Executed: 2001-05-11

ESCORCIA, ORLANDO

Executed: 2001-05-11

HAN, QINGYUAN

Executed: 2001-05-11

SAKTHIVEL, PALANI

Executed: 2001-05-11

WALDFRIED, CARLO

Executed: 2001-05-11

Assignee

AXCELIS TECHNOLOGIES

55 CHERRY HILL DRIVE, BEVERLY, MA, 01915, UNITED STATES

Covered Property (1)

Plasma Ashing Process

Application: 09/855,177 →