Patent Assignment
Reel/Frame 011902/0777
Assignment of Assignor's Interest
Recorded: 2001-06-05
Received: 2001-06-21
Pages: 4
Assignee
SEMITOOL, INC.
655 WEST RESERVE DRIVE, KALISPELL, MT, 59901, UNITED STATES
Covered Properties
(2)
Mosfet with Sige Source/Drain Regions and Epitaxial Gate Dielectric
Application:
09/877,906 →
Transfer Devices for Handling Microelectronic Workpieces Within an Environment of a Processing Machine and Methods of Manufacturing and Using Such Devices in the Processing of Microelectronic Workpieces
Application:
09/875,300 →