Assignment of Assignor's Interest

Recorded: 2001-05-11 Received: 2001-06-22 Pages: 3

Assignors

MEYER, HEINRICH

Executed: 2001-04-26

THIES, ANDREAS

Executed: 2001-05-08

Assignee

ATOTECH DEUTSCHLAND GMBH

ERASMUSSTRASSE 20, D-10553, BERLIN, DEX, GERMANY

Covered Property (1)

Method for Galvanically Forming Conductor Structures of High-Purity Copper in the Production of Integrated Circuits

Application: 09/831,763 →