Assignment of Assignor's Interest

Recorded: 2001-06-22 Pages: 3

Assignor

POKOMY, JOACHIM

Executed: 2001-05-02

Assignee

STEAG MICROTECH GMBH

CARL-BENZ-STRASSE 10, PLIEZHAUSEN, D-721, GERMANY

Covered Property (1)

Apparatus and Method for Processing Substrates

Patent: 6,488,987 →

Application: 09/869,214 →

Related Assignments (1)

Other recorded transfers of the patent in this record — the chain of ownership.