Patent Assignment
Reel/Frame 012143/0474
Assignment of Assignor's Interest
Recorded: 2001-08-30
Pages: 3
Assignors
SHCHEGROV, ANDREI V.
Executed: 2001-07-19
FABRIKANT, ANATOLY
Executed: 2001-07-19
NIKOONAHAD, MEHRDAD
Executed: 2001-07-19
Assignees
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
KLA-TENCOR TECHNOLOGIES CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Parametric Profiling Using Optical Spectroscopic Systems