Patent Assignment
Reel/Frame 012242/0849
Assignment of Assignor's Interest
Recorded: 2001-10-03
Pages: 4
Assignors
CHIANG, TONY P.
Executed: 2001-10-02
LEESER, KARL F.
Executed: 2001-10-02
BROWN, JEFFREY A.
Executed: 2001-10-02
BABCOKE, JASON E.
Executed: 2001-10-02
Assignee
ANGSTRON SYSTEMS, INC.
3350 SCOTT BLVD., BLDG. 62, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
ALD reactor employing electrostatic chuck
Application:
09/970,867 →
Publication:
US 2002/0144657