Assignment of Assignor's Interest

Recorded: 2001-09-28 Received: 2001-10-24 Pages: 3

Assignors

POKORNY, JOACHIM

Executed: 2001-07-25

STEINRUCKE, ANDREAS

Executed: 2001-07-25

Assignee

STEAG MICROTECH GMBH

CARL-BENZ-STRASSE 10, PLIEZHAUSEN, DEX, D-721, GERMANY

Covered Property (1)

Device and Method for Processing Substrates

Application: 09/869,213 →