Assignment of Assignor's Interest

Recorded: 2002-01-16 Received: 2002-01-16 Pages: 4

Assignors

GRAHAM, SAMUEL JR.

Executed: 2002-01-09

GRUNOW, PHILLIP

Executed: 2002-01-09

KLEBANOFF, LEONARD E.

Executed: 2002-01-09

Assignee

EUV LLC

MS SCI-02, 2200 MISSION COLLEGE BLVD., SANTA CLARA, CA, 95052, UNITED STATES

Covered Property (1)

Apparatus for in Situ Cleaning of Carbon Contaminated Surfaces

Application: 09/956,543 →