Patent Assignment
Reel/Frame 012345/0611
Assignment of Assignor's Interest
Recorded: 2001-11-30
Pages: 3
Assignor
PAIK, YOUNG JOSEPH
Executed: 2001-11-27
Assignee
APPLIED MATERIALS INC.
3050 BOWERS AVENUE, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Feedforward and Feedback Control for Conditioning of Chemical Mechanical Polishing Pad