Patent Assignment
Reel/Frame 012366/0962
Assignment of Assignor's Interest
Recorded: 2001-12-04
Received: 2001-12-19
Pages: 9
Assignors
DREW, MITCHELL
Executed: 2001-09-07
VAN DER MEULEN, PETER
Executed: 2001-10-20
ADAMS, DOUGLAS R.
Executed: 2001-10-31
BEAULIEU, DAVID R.
Executed: 2001-11-28
Assignee
BROOKS AUTOMATION
15 ELIZABETH DRIVE, CHELMSFORD, MA, 01824, UNITED STATES
Covered Property
(1)
Substrate Processing Apparatus with Independently Configurable Integral Load Locks
Application:
10/006,263 →