Patent Assignment
Reel/Frame 012419/0303
Assignment of Assignor's Interest
Recorded: 2001-10-22
Received: 2002-01-09
Pages: 3
Assignor
BROWN, DAVID C.
Executed: 2001-10-19
Assignee
GSI LUMONICS CORPORATION
39 MANNING ROAD, BILLERICA, MA, 01821, UNITED STATES
Covered Properties
(2)
A Method for Making a Galvanometer with Axial Symmetry
Application:
10/029,470 →
Reduced Thickness Variation in a Material Layer Deposited in Norrow and Wide Integrated Circuit Trenches
Application:
10/033,114 →