Patent Assignment
Reel/Frame 012481/0631
Assignment of Assignor's Interest
Recorded: 2002-01-17
Pages: 3
Assignee
IBIDEN CO., LTD.
1, KANDACHO 2-CHOME, OGAKI-SHI, GIFU 503-0917, JAPAN
Covered Property
(1)
Aluminum Nitride Sintered Compact, Ceramic Substrate, Ceramic Heater and Electrostatic Chuck