Assignment of Assignor's Interest

Recorded: 2002-03-18 Pages: 4

Assignors

CHANG, JIM J. C.

Executed: 2002-02-07

FORNACIARI, NEAL R.

Executed: 2002-01-22

SPENCE, PAUL A.

Executed: 2002-01-22

Assignee

EUV LLC

MS SCI-02, 2200 MISSION COLLEGE BLVD., SANTA CLARA, CALIFORNIA, 95052

Covered Property (1)

Electrode Configuration for Extreme-Uv Electrical Discharge Source

Patent: 6,498,832 →

Application: 09/808,587 →

Publication: US 2002/0159568

Related Assignments (2)

Other recorded transfers of the patent in this record — the chain of ownership.