Patent Assignment
Reel/Frame 012501/0689
Assignment of Assignor's Interest
Recorded: 2001-12-12
Received: 2002-01-29
Pages: 3
Assignee
STEAG MICRO TECH GMBH
CARL-BENZ-STRASSE 10, PLIEZHAUSEN, DEX, D-721, GERMANY
Covered Properties
(2)
Apparatus and Method for Treating Substrates
Application:
09/913,985 →
Treated Ion Exchange Resin and Method for Treatment Thereof
Application:
09/947,935 →