Patent Assignment
Reel/Frame 012504/0255
Assignment of Assignor's Interest
Recorded: 2002-01-11
Received: 2002-01-29
Pages: 5
Assignors
EMESH, ISMAIL
Executed: 2002-01-10
GOPALAN, PERIYA
Executed: 2002-01-11
PALMER, BENTLEY J.
Executed: 2002-01-11
RAYER, II, PHILLIP M.
Executed: 2002-01-11
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, AZ, 85226, UNITED STATES
Covered Property
(1)
Method and Apparatus for the Electrochemical Deposition and Planarization of a Material on a Workpiece Surface
Application:
10/044,514 →