Assignment of Assignor's Interest

Recorded: 2002-01-17 Received: 2002-01-31 Pages: 5

Assignors

CHADDA, SAKET

Executed: 2002-01-15

EMESH, ISMAIL

Executed: 2002-01-15

LAURSEN, THOMAS

Executed: 2002-01-16

PALMER, BENTLEY J.

Executed: 2002-01-16

Assignee

SPPEDFAM-IPEC CORPORATION

305 NORTH 54TH STREET, CHANDLER, AZ, 85226, UNITED STATES

Covered Property (1)

Method for Polishing Copper on a Workpiece Surface

Application: 10/052,010 →