Patent Assignment
Reel/Frame 012586/0055
Assignment of Assignor's Interest
Recorded: 2002-02-08
Received: 2002-02-22
Pages: 3
Assignee
AXCELIS TECHNOLOGIES, INC.
55 CHERRY HILL DRIVE, BEVERLY, MA, 01915, UNITED STATES
Covered Properties
(2)
Reactor Assembly and Processing Method
Application:
10/071,908 →
Method and Apparatus for Programming Programmable Controllers and Generating Configuration Data from a Centralized Server
Application:
09/961,931 →