Patent Assignment
Reel/Frame 012655/0619
Assignment of Assignor's Interest
Recorded: 2002-02-26
Received: 2002-03-13
Pages: 3
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Polishing Head Assembly in an Apparatus for Chemical Mechancial Planarization
Application:
09/999,066 →