Patent Assignment
Reel/Frame 012749/0347
Assignment of Assignor's Interest
Recorded: 2002-03-29
Received: 2002-04-08
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
Fluid Conserving Platen for Optimizing Edge Polishing
Application:
10/112,424 →