Patent Assignment
Reel/Frame 012749/0410
Assignment of Assignor's Interest
Recorded: 2002-03-29
Received: 2002-04-08
Pages: 2
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CA, 94538, UNITED STATES
Covered Property
(1)
System and Method of Broad Band Optical End Point Detection for Film Change Indication
Application:
10/112,425 →