Patent Assignment
Reel/Frame 012789/0537
Assignment of Assignor's Interest
Recorded: 2002-04-04
Pages: 4
Assignors
CHIANG, TONY P.
Executed: 2002-03-12
LEESER, KARL F.
Executed: 2002-03-12
BROWN, JEFFREY A.
Executed: 2002-03-12
BABCOKE, JASON E.
Executed: 2002-03-12
Assignee
ANGSTRON SYSTEMS, INC.
3350 SCOTT BOULEVARD, BUILDING 62, SANTA CLARA, CALIFORNIA, 95054
Covered Property
(1)
Process sequence for atomic layer deposition
Application:
09/999,532 →
Publication:
US 2002/0076507