Patent Assignment
Reel/Frame 012806/0514
Assignment of Assignor's Interest
Recorded: 2002-04-11
Received: 2002-04-24
Pages: 5
Assignors
FARMER, JAMES L.
Executed: 2002-04-10
HERB, JOHN D.
Executed: 2002-04-10
KOROVIN, NIKOLAY N.
Executed: 2002-04-10
SCHULTZ, STEPHEN C.
Executed: 2002-04-10
Assignee
SPEEDFAM-IPEC CORPORATION
305 NORTH 54TH STREET, CHANDLER, AZ, 85226, UNITED STATES
Covered Property
(1)
Work Piece Carrier with Adjustable Pressure Zones and Barriers and a Method of Planarizing a Work Piece
Application:
10/120,600 →