Patent Assignment
Reel/Frame 012903/0878
Assignment of Assignor's Interest
Recorded: 2002-05-08
Received: 2002-05-22
Pages: 3
Assignor
ARNO, JOSE I.
Executed: 2002-05-01
Assignee
ADVANCED TECHNOLOGY MATERIALS, INC.
7 COMMERCE DRIVE, DANBURY, CT, 06810, UNITED STATES
Covered Property
(1)
Infrared Thermopile Detector System for Semiconductor Process Monitoring and Control
Application:
10/140,848 →