Assignment of Assignor's Interest

Recorded: 2002-05-31 Received: 2002-06-04 Pages: 4

Assignors

SCHRIEVER, GUIDO

Executed: 2002-04-25

REBHAN, ULRICH

Executed: 2002-04-26

Assignee

LAMBDA PHYSIK AG

HANS-BOCKLER-STRASSE 12, D-37079 GOTTINGEN, DEX, GERMANY

Covered Property (1)

Method and Apparatus for Generating High Output Power Gas Discharge Based Source of Extreme Ultraviolet Radiation and/or Soft X-Rays

Application: 10/109,581 →