Patent Assignment
Reel/Frame 012939/0141
Assignment of Assignor's Interest
Recorded: 2002-05-31
Received: 2002-06-04
Pages: 3
Assignor
WEICKENMEIER, ANDREAS
Executed: 2002-03-22
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, OBERKOCHEN, DEX, D-734, GERMANY
Covered Property
(1)
Particle-Optical Lens Arrangement and Method Employing Such a Lens Arrangement
Application:
10/087,601 →