Patent Assignment
Reel/Frame 012956/0136
Assignment of Assignor's Interest
Recorded: 2002-06-04
Pages: 2
Assignor
YOTSUMOTO, HATSUO
Executed: 2002-03-14
Assignee
MITSUBISHI DENKI KABUSHIKI KAISHA
CHIYODA-KU, 2-3 MARUNOUCHI, 2-CHOME, TOKYO, 100-8, JAPAN
Covered Property
(1)
Washer for washing a semiconductor wafer
Application:
10/096,539 →
Publication:
US 2003/0084927
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.