Assignment of Assignor's Interest

Recorded: 2002-04-17 Received: 2002-08-06 Pages: 2

Assignors

MEURLS, MARC

Executed: 2002-03-12

SCHNEIDER, JENS

Executed: 2002-03-12

SPEH, ULRICH

Executed: 2002-03-12

Assignees

STEAG MICRO TECH GMBH

CARL-BENZ-STRASSE 10, D-72124 PILEZHAUSEN,, DEX, GERMANY

IMEC

KAPELDREEF 75, 3001 LEUVEN,, BEX, BELGIUM

Covered Properties (2)

Apparatus for Treating Substrates

Application: 10/031,923 →

Element for a Superpressure Static Fluid Seal

Application: 29/152,778 →