Patent Assignment
Reel/Frame 013002/0504
Assignment of Assignor's Interest
Recorded: 2002-06-13
Received: 2002-06-24
Pages: 3
Assignor
SHIRAMIZU, YOSHIMI
Executed: 2002-05-31
Assignee
NEC CORPORATION
7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Retaining box, and a feeding apparatus of a semiconductor wafer, which can feed or retain a semiconductor wafer without any contamination of the semiconductor wafer caused by a hydrocarbon in air and a hydrocarbon generated from a retaining box
Application:
10/167,481 →