Patent Assignment
Reel/Frame 013018/0581
Assignment of Assignor's Interest
Recorded: 2002-06-21
Pages: 2
Assignee
CANON KABUSHIKI KAISHA
3-30-2 SHIMOMARUKO, OHTA-KU, TOKYO,, JAPAN
Covered Property
(1)
Exposure Method, Plane Alignment Method, Exposure Apparatus, and Device Manufacturing Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.