Patent Assignment
Reel/Frame 013074/0898
Assignment of Assignor's Interest
Recorded: 2002-07-08
Received: 2002-07-16
Pages: 2
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22,, D-73447 OBERKOCHEN, DEX, GERMANY
Covered Property
(1)
Catadioptric Objective
Application:
10/117,943 →