Assignment of Assignor's Interest

Recorded: 2002-07-15 Received: 2002-07-24 Pages: 2

Assignors

HAGIMOTO, YOSHIYA

Executed: 2002-07-04

SASAKI, YASUSHI

Executed: 2002-07-04

Assignee

NEC CORPORATION

7-1, SHIBA 5-CHOME, MINATO-KU, TOKYO, JPX, JAPAN

Covered Property (1)

Back-surface cleaning method for cleaning the back surface of a silicon wafer

Application: 10/195,064 →