Patent Assignment
Reel/Frame 013132/0960
Assignment of Assignor's Interest
Recorded: 2002-07-18
Pages: 5
Assignors
CHUNG, HUA
Executed: 2002-07-10
CHEN, LING
Executed: 2002-07-10
CHIN, BARRY L.
Executed: 2002-07-16
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450-A, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Cyclical Deposition of Refractory Metal Silicon Nitride