Patent Assignment
Reel/Frame 013173/0097
Assignment of Assignor's Interest
Recorded: 2002-08-07
Pages: 3
Assignors
EPPLER, AARON
Executed: 2002-06-18
SRINIVASAN, MUKUND
Executed: 2002-06-19
CHEBI, ROBERT
Executed: 2002-06-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Process for Etching Dielectric Films with Improved Resist and/or Etch Profile Characteristics