Patent Assignment
Reel/Frame 013192/0734
Assignment of Assignor's Interest
Recorded: 2002-08-13
Received: 2002-08-19
Pages: 2
Assignor
GERHARD, MICHAEL
Executed: 2002-07-04
Assignee
CARL ZEISS SEMICONDUCTOR MANUFACTURING TECHNOLOGIES AG
CARL-ZEISS-STRASSE 22, 73447 OBERKOCHEN, DEX, GERMANY
Covered Property
(1)
Optical Imaging System with Polarizer and a Crystalline-Quartz Plate for Use Therewith
Application:
10/145,138 →