Patent Assignment
Reel/Frame 013200/0500
Assignment of Assignor's Interest
Recorded: 2002-08-20
Pages: 4
Assignor
GOODMAN, DANIEL
Executed: 2002-08-07
Assignee
APPLIED SCIENCE AND TECHNOLOGY, INC.
90 INDUSTRIAL WAY, WILMINGTON, MASSACHUSETTS, 01887-4610
Covered Property
(1)
Stabilization of electronegative plasmas with feedback control of RF generator systems
Application:
10/151,722 →
Publication:
US 2003/0213559