Patent Assignment
Reel/Frame 013234/0589
Assignment of Assignor's Interest
Recorded: 2002-08-09
Received: 2002-11-05
Pages: 2
Assignee
STEAG MICROTECH GMBH
CARL-BENZ-STRASSE 10, D-72124 PLIEZHAUSEN, DEX, GERMANY
Covered Property
(1)
Method and device for treating substrates
Application:
10/110,179 →