Patent Assignment
Reel/Frame 013281/0886
Assignment of Assignor's Interest
Recorded: 2002-09-11
Received: 2002-09-17
Pages: 2
Assignors
HIRATANI, MASAHIKO
Executed: 2000-12-27
MATSUI, YUICHI
Executed: 2000-12-27
SHIMAMOTO, YASUHIRO
Executed: 2000-12-27
NABATAME, TOSHIHIDE
Executed: 2000-12-28
NAKAMURA, YOSHITAKA
Executed: 2000-12-28
Assignee
HITACHI, LTD.
6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU, TOKYO, JPX, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Devices Utilizing Underlayer-Dependency of Deposition of Capacitor Electrode Film, and Semiconductor Device
Application:
09/767,706 →