Patent Assignment
Reel/Frame 013300/0213
Assignment of Assignor's Interest
Recorded: 2002-09-17
Pages: 3
Assignor
PARSONS, RICHARD
Executed: 2002-09-10
Assignee
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU, TOKYO 107, JAPAN
Covered Property
(1)
Control of Power Delivered to a Multiple Segment Inject Electrode