Change of Name

Recorded: 2002-10-07 Received: 2002-10-09 Pages: 4

Assignor

SILICON VALLEY GROUP, INC.

Executed: 2001-11-01

Assignee

ASML US, INC.

440 KINGS VILLAGE ROAD, SCOTTS VALLEY, CA, 95066, UNITED STATES

Covered Property (1)

Hot Wall Rapid Thermal Processor

Application: 09/934,952 →