Patent Assignment
Reel/Frame 013406/0129
Assignment of Assignor's Interest
Recorded: 2002-10-17
Pages: 3
Assignor
CHANG, CHUNG-HSING
Executed: 2002-08-14
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO. LTD.
NO. 121 PARK AVENUE 3, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, R.O.C., TAIWAN
Covered Property
(1)
Tri-Tone Attenuated Phase Shift Trim Mask for Double Exposure Alternating Phase Shift Mask Process