Patent Assignment
Reel/Frame 013415/0460
Assignment of Assignor's Interest
Recorded: 2002-10-18
Pages: 3
Assignors
WANG, XIKUN
Executed: 2002-10-16
CHEN, HUI
Executed: 2002-10-16
JIANG, ANBEI
Executed: 2002-10-16
SHIH, HONG
Executed: 2002-10-16
S Y MAK, STEVE
Executed: 2002-10-16
Assignee
APPLIED MATERIALS, INC.
P.O. BOX 450A, PATENT/LEGAL DEPARTMENT - M/S 2061, SANTA CLARA, CALIFORNIA, 95052
Covered Property
(1)
Fluorine Free Integrated Process for Etching Aluminum Including Chamber Dry Clean